Organic Vapour Phase Deposition (OVPD)
Machine name: | Organic Vapour Phase Deposition (OVPD) |
Machine type: | OVPD Pilot-to-Production Line |
Substrate types to be processed: | Glass, Polymer |
Substrate dimension: | 20×20 cm |
Technologies available: | Deposition of Organic small molecules based on the gas phase transport principle, In-line metrology tools (Spectroscopic Ellipsometry and Raman Spectroscopy (RS) |
Deposition materials available: | Organic small molecules |
Typical applications: | Printed electronics (OPVs & OLEDs) |
Deliverables
Specifications and Deliverables
Substrate types to be processed: Glass, Polymer
Substrate dimension: 20×20 cm
Substrate dimension: 20×20 cm
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