Spectroscopic ellipsometry
Equipment
HORIBA: UVISEL-VASE
Application examples
Determination of thin film thickness and optical constants for optical-grade functional coatings (UC4)
Deliverables
Specifications and Deliverables
Samples Sizes up to 10 × 10 cm
Spectral Range: 250 -1100 nm
Possibility of in-line measurements in R2R pilot line
Variable angle, 0.6-6.5 eV, real-time measurements
Spectral Range: 250 -1100 nm
Possibility of in-line measurements in R2R pilot line
Variable angle, 0.6-6.5 eV, real-time measurements
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